SPECIAL SECTION ON OPTICAL METROLOGY DEVELOPMENTS AND APPLICATIONS IN THE TRANSPORTATION INDUSTRY

Valve cone measurement using white light interference microscopy in a spherical measurement geometry

[+] Author Affiliations
Peter de Groot, Xavier Colonna de Lega

Zygo Corporation, Laurel Brook Road, Middlefield, Connecticut?06455

Opt. Eng. 42(5), 1232-1237 (May 01, 2003). doi:10.1117/1.1565350
History: Received Sep. 19, 2002; Revised Oct. 18, 2002; Accepted Oct. 18, 2002; Online May 05, 2003
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We describe an interference microscope for valve cone angle, roundness, straightness, and waviness using scanning white light interferometry. Our unusual test geometry creates a spherical optical measurement surface centered at an optical datum point that represents the center of curvature of the mating valve needle or ball. A radial scan locates intersections of the measurement surface with respect to the datum point, and software reconstructs the conical sample surface by means of a calibrated mapping function. This flexible approach accommodates a wide range of cone angles and diameters without a change of optics. Experimental results show promising performance, including a 0.02-μm standard deviation for cone roundness, including sample removal and replacement. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Peter de Groot and Xavier Colonna de Lega
"Valve cone measurement using white light interference microscopy in a spherical measurement geometry", Opt. Eng. 42(5), 1232-1237 (May 01, 2003). ; http://dx.doi.org/10.1117/1.1565350


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