METROLOGY

Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to highly accurate projected fringe profilometry

[+] Author Affiliations
Wei-Hung Su, Hongyu Liu

The Pennsylvania State University, Department of Electrical Engineering, University Park, Pennsylvania 16802 E-mail: sxy105psu.edu

Karl Reichard

The Pennsylvania State University, Applied Research Laboratory, State College, Pennsylvania 16804

Shizhuo Yin, Francis T. S. Yu

The Pennsylvania State University, Department of Electrical Engineering, University Park, Pennsylvania 16802

Opt. Eng. 42(6), 1730-1740 (Jun 01, 2003). doi:10.1117/1.1573217
History: Received Aug. 28, 2002; Revised Nov. 27, 2002; Accepted Nov. 27, 2002; Online May 21, 2003
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Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to calibration-based highly accurate phase-shifting projected fringe profilometry are presented. The main advantages of using digital sinusoidal gratings are (1) high geometrical accuracy (< 1 μm); (2) high contrast ratio; and (3) very low high-order harmonic distortion. In addition, a high-quality diffusive flat with precisely controlled lateral correlation length, fabricated by VLSI processes, offers a good calibration standard. It is found that, by applying these two components to the calibration-based phase-shifting projected fringe profilometry, absolute 3-D surface profile measurement accuracy on the order of microns can be achieved. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Wei-Hung Su ; Hongyu Liu ; Karl Reichard ; Shizhuo Yin and Francis T. S. Yu
"Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to highly accurate projected fringe profilometry", Opt. Eng. 42(6), 1730-1740 (Jun 01, 2003). ; http://dx.doi.org/10.1117/1.1573217


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