Interferometry

Sensitivity improvement in phase-shifted moire´ interferometry using 1-D continuous wavelet transform image processing

[+] Author Affiliations
Heng Liu, Alexander N. Cartwright, Cemal Basaran

University at Buffalo, Electronics Packaging Laboratory, The State University of New York, Buffalo, New York?14260 E-mail: anc@eng.buffalo.edu

Opt. Eng. 42(9), 2646-2652 (Sep 01, 2003). doi:10.1117/1.1592803
History: Received Sep. 27, 2002; Revised Jan. 3, 2000; Revised Feb. 27, 2003; Accepted Feb. 27, 2003; Online August 22, 2003
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A method to accurately determine the relative phase between images acquired using phase-shifted moire´ interferometry is presented. Phase shifting, combined with the accurate determination of the relative phase shift, provides an improvement of the sensitivity of moire´ interferometry from 0.417 μm/fringe to 27.8 nm/fringe. Specifically, a 1-D continuous wavelet transform technique was developed to effectively reduce the transient environmentally induced noise and the static background noise that complicate phase determination. Using this technique, accurate relative phase shifts of the interferogram frames were determined with an error of 2%. As a result, very smooth and accurate phase-map reconstruction of the initially noisy interferogram was accomplished. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Heng Liu ; Alexander N. Cartwright and Cemal Basaran
"Sensitivity improvement in phase-shifted moire´ interferometry using 1-D continuous wavelet transform image processing", Opt. Eng. 42(9), 2646-2652 (Sep 01, 2003). ; http://dx.doi.org/10.1117/1.1592803


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