Fabrication of multilevel structures in self-development photosensitive hybrid sol-gel glass by a gray scale mask

Weixing Yu; Xiaocong Yuan

doi:10.1117/1.1625678

1 December 2003 Fabrication of multilevel structures in self-development photosensitive hybrid sol-gel glass by a gray scale mask

Weixing Yu, Xiaocong Yuan

Author Affiliations +

Optical Engineering, Vol. 42, Issue 12, (December 2003). https://doi.org/10.1117/1.1625678

Abstract

To extend the application of self-development sol-gel glass, we report a simple method to fabricate arbitrary multilevel structures in self-development photosensitive hybrid sol-gel glass by using a high-energy beam-sensitive gray scale mask under UV radiation. Characterization results showed that the maximum depth of deformation induced by the UV light can be more than 1.3 μm, which makes it possible to fabricate diffractive optical elements with a 2π phase delay for visible light. As an example, the self-development sol-gel glass was used for fabrication of blazed gratings with excellent surface smoothness.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Weixing Yu and Xiaocong Yuan "Fabrication of multilevel structures in self-development photosensitive hybrid sol-gel glass by a gray scale mask," Optical Engineering 42(12), (1 December 2003). https://doi.org/10.1117/1.1625678

Published: 1 December 2003

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