Thin Films

Single-wavelength monitoring method for optical thin-film coating

[+] Author Affiliations
Cheng Zhang, Yongtian Wang, Weiqiang Lu

Beijing Institute of Technology, Department of Optoelectronic Engineering, Beijing?100081, China

Opt. Eng. 43(6), 1439-1444 (Jun 01, 2004). doi:10.1117/1.1719027
History: Received Oct. 9, 2003; Revised Dec. 19, 2003; Accepted Dec. 21, 2003; Online May 28, 2004
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A new optical monitoring method for thin-film coating is described. Based on the admittance loci theory of Macleod, the traditional turning point method, and level monitoring method, the new method is able to compensate the coating error and break the transfer of error to the subsequent layers. The method can be applied to monitor deposition of quarter-wave optical thickness films or nonquarter-wave optical thickness films. Theoretical analysis shows the method can effectively improve the monitoring accuracy. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Cheng Zhang ; Yongtian Wang and Weiqiang Lu
"Single-wavelength monitoring method for optical thin-film coating", Opt. Eng. 43(6), 1439-1444 (Jun 01, 2004). ; http://dx.doi.org/10.1117/1.1719027


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