Single-wavelength monitoring method for optical thin-film coating

Cheng Zhang; Yongtian Wang; Weiqiang Lu

doi:10.1117/1.1719027

1 June 2004 Single-wavelength monitoring method for optical thin-film coating

Cheng Zhang, Yongtian Wang, Weiqiang Lu

Author Affiliations +

Optical Engineering, Vol. 43, Issue 6, (June 2004). https://doi.org/10.1117/1.1719027

Abstract

A new optical monitoring method for thin-film coating is described. Based on the admittance loci theory of Macleod, the traditional turning point method, and level monitoring method, the new method is able to compensate the coating error and break the transfer of error to the subsequent layers. The method can be applied to monitor deposition of quarter-wave optical thickness films or nonquarter-wave optical thickness films. Theoretical analysis shows the method can effectively improve the monitoring accuracy.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Cheng Zhang, Yongtian Wang, and Weiqiang Lu "Single-wavelength monitoring method for optical thin-film coating," Optical Engineering 43(6), (1 June 2004). https://doi.org/10.1117/1.1719027

Published: 1 June 2004

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