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OE Letters

Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator

[+] Author Affiliations
Yanzhe Tang

Zhejiang University, Department of Information Science and Electronic Engineering, Hangzhou 310027, China

Wenhui Wang, Yaming Wu

Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, State Key Labs of Transducer Technology, Shanghai 200050, China

Jianyi Yang, Yuelin Wang

Zhejiang University, Department of Information Science and Electronic Engineering, Hangzhou 310027, China

Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, State Key Labs of Transducer Technology, Shanghai 200050, China

Opt. Eng. 43(11), 2495-2496 (Nov 01, 2004). doi:10.1117/1.1804545
History: Received Mar. 29, 2004; Revised Jul. 19, 2004; Accepted Jul. 21, 2004; Online November 03, 2004
Text Size: A A A

A 1×8 multimode interference coupler with a strong confinement structure in the multimode region was proposed and fabricated on silicon-on-insulator material. In the multimode region, the waveguide was etched to the buried silica layer so as to realize the strong confinement and obtain better resolution of the self-imaging effect, while in the input/output ports, the rib waveguides with the large cross-section rib structure were designed to satisfy the single-mode condition, with which the device could be efficiently coupled with single-mode fibers or other waveguide devices. The fabrication process was also specially designed to eliminate the photolithography alignment error. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Yanzhe Tang ; Wenhui Wang ; Yaming Wu ; Jianyi Yang and Yuelin Wang
"Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator", Opt. Eng. 43(11), 2495-2496 (Nov 01, 2004). ; http://dx.doi.org/10.1117/1.1804545


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