Special Section On Diffractive Optics

Some application cases and related manufacturing techniques for optically functional microstructures on large areas

[+] Author Affiliations
Andreas Gombert, Benedikt Bla¨si, Christopher Bu¨hler, Peter Nitz

Fraunhofer Institute for Solar Energy Systems ISE, Heidenhofstr. 2, 79110 Freiburg, Germany E-mail: Andreas.Gombert@ise.fraunhofer.de

Jo¨rg Mick

Albert-Ludwigs-Universita¨t Freiburg, Institute for Microsystem Technology, Georges-Ko¨hler-Allee, 79110 Freiburg, Germany

Wolfgang Hoßfeld, Michael Niggemann

Fraunhofer Institute for Solar Energy Systems ISE, Heidenhofstr. 2, 79110 Freiburg, Germany

Opt. Eng. 43(11), 2525-2533 (Nov 01, 2004). doi:10.1117/1.1803552
History: Received Dec. 1, 2003; Revised Apr. 5, 2004; Accepted Apr. 21, 2004; Online November 03, 2004
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With surface-relief structures, optical functions that are required for radiation power management such as antireflection, light trapping, or light distribution and redirection can be obtained for new applications in solar energy systems and in displays. There, structures with submicrometer features must be distributed over large areas homogeneously. We address the design and the whole experimental process chain from the microstructure origination on large areas to the replication and the system integration in the specific application. Topics are antireflective surfaces for solar systems and displays, light trapping in polymer solar cells, sun protection systems for facades, and diffusers for projection displays and in glazing. For the microstructure origination we investigate the suitability of holographic recording in photoresist using a large-scale interferometer. We use an argon ion laser as a coherent light source at a wavelength of 364 nm. Periodic and stochastic interference patterns are recorded in positive photoresist with the interferometer setup. In the case of periodic structures, grating periods between 200 nm and 20 μm are realized. By carefully modeling the resulting resist profiles it is possible to originate even prismatic surface-relief profiles. Structures with good homogeneity are originated on areas of up to 4800 cm2 by optimizing the interferometer setup and the photoresist processing. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Andreas Gombert ; Benedikt Bla¨si ; Christopher Bu¨hler ; Peter Nitz ; Jo¨rg Mick, et al.
"Some application cases and related manufacturing techniques for optically functional microstructures on large areas", Opt. Eng. 43(11), 2525-2533 (Nov 01, 2004). ; http://dx.doi.org/10.1117/1.1803552


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