Special Section On Diffractive Optics

Design and fabrication technologies for ultraviolet replicated micro-optics

[+] Author Affiliations
Hartmut Rudmann, Markus Rossi

Heptagon Oy, Moosstrasse 2, 8803 Ru¨schlikon, Switzerland E-mail: Markus.Rossi@heptagon.fi

Opt. Eng. 43(11), 2575-2582 (Nov 01, 2004). doi:10.1117/1.1803554
History: Received Dec. 1, 2003; Revised May 13, 2004; Accepted Jun. 29, 2004; Online November 03, 2004
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A wafer scale UV replication process is described that is suitable for mass production of micro-optical components. The fabrication process is divided into two phases. In phase 1, the design and mastering is done and a wafer-sized embossing tool is fabricated. In phase 2 of the process chain, the batch fabrication process is performed. From a single embossing tool, several identical wafer-sized replicas are fabricated that are then diced into the final components. Single-sided as well as double-sided replicas can be made. The economical flexibility of the UV replication chain is demonstrated through two application examples: High-quality components that pass strict environmental tests, which compete with etched silica structures, and low-cost micro-optical components, which compete with microinjection molded parts. All UV-replicated components have in common that they exhibit excellent optical quality and pass an IR reflow process. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Hartmut Rudmann and Markus Rossi
"Design and fabrication technologies for ultraviolet replicated micro-optics", Opt. Eng. 43(11), 2575-2582 (Nov 01, 2004). ; http://dx.doi.org/10.1117/1.1803554


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