Experimental study on the measurement of micro structures

Qingxiang Li; Yuhe Li; Boxiong Wang; Shifu Xue

doi:10.1117/1.1795261

1 November 2004 Experimental study on the measurement of micro structures

Qingxiang Li, Yuhe Li, Boxiong Wang, Shifu Xue

Author Affiliations +

Optical Engineering, Vol. 43, Issue 11, (November 2004). https://doi.org/10.1117/1.1795261

Abstract

Measurement of micro structures is a key issue in microtechnology, and it will influence the production efficiency and quality of large-scale integrated circuits. An experimental study on the factors affecting the accuracy of measurement of micro structures has been carried out with a laboratory-built DXY-1 type linewidth measuring system. The experiment results show that the repeatability of the system is better than ±0.005 μm, and the difference between the nominal and measured values is less than ±0.02 μm.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Qingxiang Li, Yuhe Li, Boxiong Wang, and Shifu Xue "Experimental study on the measurement of micro structures," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1795261

Published: 1 November 2004

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