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Interferometry

Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

[+] Author Affiliations
Caini Zhang, Xiangzhao Wang

Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, Information Optics Laboratory, Shanghai 201800, China E-mail: zhang-cain@yahoo.com.cn

Opt. Eng. 43(12), 3008-3013 (Dec 01, 2004). doi:10.1117/1.1810141
History: Received Nov. 12, 2003; Revised Feb. 23, 2004; Accepted May 9, 2004; Online December 07, 2004
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We propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. The interferometer is based on a Fabry-Perot plate. It has a simple structure and is insensitive to external disturbance. Sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. A charge-coupled device (CCD) image sensor is used for measuring the distance between the reflected beams from two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. Compared with Michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. The numerical calculation and experimental results verify the usefulness of this novel interferometer. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Caini Zhang and Xiangzhao Wang
"Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement", Opt. Eng. 43(12), 3008-3013 (Dec 01, 2004). ; http://dx.doi.org/10.1117/1.1810141


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