Instrumentation, Measurement, and Metrology

Surface profiling using phase shifting Talbot interferometric technique

[+] Author Affiliations
Saba Mirza, Chandra Shakher

Indian Institute of Technology, Delhi, Laser Application and Holography Laboratory, Instrument Design and Development Centre, New Delhi—110 016, IndiaE-mail: cshakher@hotmail.com, cshakher@iddc.iitd.ernet.in

Opt. Eng. 44(1), 013601 (Dec. 16, 2004). doi:10.1117/1.1827608
History: Received Dec. 31, 2003; Revised Jun. 17, 2004; Accepted Jun. 17, 2004; Dec. 16, 2004; Online December 16, 2004
Text Size: A A A

We implement a phase-shifting Talbot interferometric technique to measure step heights of a single-step and channel (dip) objects. Experimentally recorded interferograms include noise due to grating lines and speckles. To make the phase map, four interferograms are recorded with π/2 phase shifts. To remove noise due to grating lines and speckle, interferogram data are first filtered using Fourier filtering. Height variations per profile of the objects is calculated from the phase map made using Fourier-filtered data. Results obtained from this technique are compared with the results acquired from a profile projector having a coordinate measurement facility with a resolution of 1 μm and an accuracy of ±1 μm. The results are in good agreement. © 2005 Society of Photo-Optical Instrumentation Engineers.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Saba Mirza and Chandra Shakher
"Surface profiling using phase shifting Talbot interferometric technique", Opt. Eng. 44(1), 013601 (Dec. 16, 2004). ; http://dx.doi.org/10.1117/1.1827608


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.