Instrumentation, Measurement, and Metrology

Low-numerical-aperture Gaussian beam confocal system for profiling optically smooth surfaces

[+] Author Affiliations
Moise´s Cywiak

Centro de Investigaciones en O´ptica, A.C., Loma del Bosque 115, Lomas del Campestre, Leo´n, Guanajuato, Me´xico, 37150 E-mail: moi@foton.cio.mx

J. Fe´lix Aguilar

Instituto Nacional de Astrofi´sica O´ptica y si Electro´nica, Luis E. Erro No. 1, Sta. Ma., Tonantzintla, Puebla, Pue. Me´xico, 72840

Bernardino Barrientos

Centro de Investigaciones en O´ptica, A.C., Loma del Bosque 115, Lomas del Campestre, Leo´n, Guanajuato, Me´xico, 37150

Opt. Eng. 44(1), 013604 (Dec. 21, 2004). doi:10.1117/1.1829712
History: Received Jan. 9, 2004; Revised Jun. 8, 2004; Accepted Jul. 15, 2004; Dec. 21, 2004; Online December 21, 2004
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We propose a simple confocal system that uses a laser Gaussian beam as a probe to measure microstructure features of curved or turned surfaces. The probe beam is focused by a lens with a low numerical aperture to maintain the beam unclipped throughout the detection process and to limit the vertical resolution to several microns. This resolution is suitable for examining the microstructure of machined surfaces. The size of the pinhole in the plane of detection is characterized for optimal depth discrimination. The analytic description is based on the propagation of Gaussian beams by using the scalar Fresnel diffraction integral. © 2005 Society of Photo-Optical Instrumentation Engineers.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Moise´s Cywiak ; J. Fe´lix Aguilar and Bernardino Barrientos
"Low-numerical-aperture Gaussian beam confocal system for profiling optically smooth surfaces", Opt. Eng. 44(1), 013604 (Dec. 21, 2004). ; http://dx.doi.org/10.1117/1.1829712


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