Design and implementation of a vacuum-compatible laser-based subnanometer-resolution absolute distance measurement system

Patrick P. Naulleau; Paul E. Denham; Senajith Rekawa

doi:10.1117/1.1830043

1 January 2005 Design and implementation of a vacuum-compatible laser-based subnanometer-resolution absolute distance measurement system

Patrick P. Naulleau, Paul E. Denham, Senajith Rekawa

Author Affiliations +

Optical Engineering, Vol. 44, Issue 1, 013605 (January 2005). https://doi.org/10.1117/1.1830043

Abstract

We describe the design and implementation of a vacuum compatible laser-based absolute distance measurement system with subnanometer resolution. The presented system is compatible with operation in the 10^–8-Torr range, and with some minor modifications it could be used in the 10^–9-Torr range. The system is based on glancing incidence reflection and dual segmented diode detection. The system has been implemented as a focus sensor for extreme ultraviolet interferometry and microlithography experiments at Lawrence Berkeley National Laboratory's Advanced Light Source synchrotron radiation facility. A 3σ operational noise floor of 0.78 nm has been demonstrated.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Patrick P. Naulleau, Paul E. Denham, and Senajith Rekawa "Design and implementation of a vacuum-compatible laser-based subnanometer-resolution absolute distance measurement system," Optical Engineering 44(1), 013605 (1 January 2005). https://doi.org/10.1117/1.1830043

Published: 1 January 2005

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