Two-grating interferometer with sinusoidal phase modulation for surface profile measurement

Yande Xu; Osami Sasaki; Takamasa Suzuki

doi:10.1117/1.1883083

1 April 2005 Two-grating interferometer with sinusoidal phase modulation for surface profile measurement

Yande Xu, Osami Sasaki, Takamasa Suzuki

Author Affiliations +

Optical Engineering, Vol. 44, Issue 4, 043601 (April 2005). https://doi.org/10.1117/1.1883083

Abstract

A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The ±first-order beams diffracted by the first grating produce parallel fringes of about 50-µm spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 µm at the equivalent wavelength of 35 µm.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yande Xu, Osami Sasaki, and Takamasa Suzuki "Two-grating interferometer with sinusoidal phase modulation for surface profile measurement," Optical Engineering 44(4), 043601 (1 April 2005). https://doi.org/10.1117/1.1883083

Published: 1 April 2005

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