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Special Section on Applications of Laser Ablation and Micromachining

Direct-write subwavelength structuring with femtosecond laser pulses

[+] Author Affiliations
Ju¨rgen Koch, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris N. Chichkov

Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, GermanyE-mail: ko@lzh.de

Opt. Eng. 44(5), 051103 (May 10, 2005). doi:10.1117/1.1904053
History: Received Jul. 1, 2004; Revised Oct. 19, 2004; Accepted Oct. 25, 2004; May 10, 2005; Online May 10, 2005
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Direct-write micro- and nanostructuring laser technologies are very important for the fabrication of new materials and multifunctional devices. Using tightly focused femtosecond laser pulses one can produce submicrometer holes and periodic structures in metals, semiconductors, and dielectrics on arbitrarily shaped surfaces. The achievable structure size is not restricted by the diffraction limit. It is determined by material properties and the laser pulse stability. We report investigations of possibilities to use femtosecond laser pulses for nanostructuring of different materials. © 2005 Society of Photo-Optical Instrumentation Engineers.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Ju¨rgen Koch ; Frank Korte ; Carsten Fallnich ; Andreas Ostendorf and Boris N. Chichkov
"Direct-write subwavelength structuring with femtosecond laser pulses", Opt. Eng. 44(5), 051103 (May 10, 2005). ; http://dx.doi.org/10.1117/1.1904053


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