Interferometry

Design and performance verification of a microscope-based interferometer for miniature-specimen metrology

[+] Author Affiliations
Chih-Kung Lee

National Taiwan University, Institute of Applied Mechanics, Taipei 106, Taiwan

Wen-Jong Wu

National Taiwan University, Department of Engineering Science and Ocean Engineering, Taipei 106, Taiwan

Giin-Yuan Wu

Sunwave Optoelectronics, Inc., 4F, No. 258 Lian-Cheng Road, Chung-ho, Taipei hsien 235, Taiwan

Chia-Ling Li

National Taiwan University, Institute of Applied Mechanics, Taipei 106, Taiwan

Zeng-De Chen

National Taiwan University, Institute of Applied Mechanics, Taipei 106, Taiwan

Jau-Yu Chen

National Taiwan University, Institute of Applied Mechanics, Taipei 106, Taiwan

Opt. Eng. 44(8), 085602 (August 10, 2005). doi:10.1117/1.2010147
History: Received June 05, 2004; Revised December 23, 2004; Accepted February 07, 2005; Published August 10, 2005
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Design and experimental verification of a microscope-based circular-polarization interferometer developed for measuring the vibration of miniature specimens is detailed. This interferometer, which comes in either a two-detector or a four-detector configuration, demonstrates that the optimum operating point of a circular-polarization interferometer depends strongly on the signal detection and processing algorithms adopted. The influence of the specimen surface optical properties on the desired operating conditions is also examined. The optimum operating point of the two-detector configuration demands that the two returning light beams emitting from the specimen possess equal intensity, which matches the understanding of traditional interferometers, where two equal interference arms achieves the best interference efficiency. Surprisingly, it appears that the optimum intensity ratio for the four-detector configuration occurs if the two interference arms possess equal intensity before it hits the specimen. That is, under the constraint of a constant light source, it appears that the optimum operating point of a four-photodetector circular-polarization interferometer is independent of the surface optical properties. Both theoretical and experimental results that verify the interaction between the optoelectronic configuration and the signal-processing algorithms implemented are presented.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Chih-Kung Lee ; Wen-Jong Wu ; Giin-Yuan Wu ; Chia-Ling Li ; Zeng-De Chen, et al.
"Design and performance verification of a microscope-based interferometer for miniature-specimen metrology", Opt. Eng. 44(8), 085602 (August 10, 2005). ; http://dx.doi.org/10.1117/1.2010147


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