Interferometry

Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement

[+] Author Affiliations
Xuefeng Zhao

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata, 950-2181, Japan

Takamasa Suzuki

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata, 950-2181, Japan

Takamasa Masutomi

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata, 950-2181, Japan

Osami Sasaki

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata, 950-2181, Japan

Opt. Eng. 44(12), 125602 (December 27, 2005). doi:10.1117/1.2148447
History: Received January 30, 2005; Revised April 25, 2005; Accepted April 29, 2005; Published December 27, 2005
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A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal’s stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera’s exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Xuefeng Zhao ; Takamasa Suzuki ; Takamasa Masutomi and Osami Sasaki
"Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement", Opt. Eng. 44(12), 125602 (December 27, 2005). ; http://dx.doi.org/10.1117/1.2148447


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