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Instrumentation, Measurement, and Metrology

Stylus profilometry for steep aspheric surfaces with multisegment stitching

[+] Author Affiliations
Yifan Dai, Shanyong Chen, Shengyi Li, Hao Hu, Qi Zhang

National University of Defense Technology, College of Mechatronic Engineering and Automation, Deya Road, Changsha, Hunan, 410073, China

Opt. Eng. 50(1), 013601 (January 18, 2011). doi:10.1117/1.3518072
History: Received April 27, 2010; Revised August 27, 2010; Accepted October 07, 2010; Published January 18, 2011; Online January 18, 2011
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A multisegment stitching method is proposed to get the profile of steep aspheric surfaces with even 90-deg edge slope. The profile is divided into several segments overlapping each other, and the segments are measured with a high-precision stylus profilometer one by one. Then an iterative algorithm is used to stitch all of the segments together, based on the minimization of inconsistency among the overlapping regions. A convex hyperbolic surface is measured with three-segment stitching, and the result is approved by full-profile testing. We also demonstrate the method with a steep elliptical surface, measured and stitched by five segments. Finally, discussions are given on the error introduced by sagittal displacement of the segments.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Yifan Dai ; Shanyong Chen ; Shengyi Li ; Hao Hu and Qi Zhang
"Stylus profilometry for steep aspheric surfaces with multisegment stitching", Opt. Eng. 50(1), 013601 (January 18, 2011). ; http://dx.doi.org/10.1117/1.3518072


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