Holography

Systematic analysis of the measurement of cone angles using high line density computer-generated holograms

[+] Author Affiliations
Jun Ma

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, Stuttgart, 70569, Germany and Nanjing University of Science and Technology, School of Electronic Engineering and Optoelectronic Techniques, Nanjing, 210094, China

Christof Pruss

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, Stuttgart, 70569, Germany

Matthias Häfner

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, Stuttgart, 70569, Germany

Bernd Heitkamp

Kugler GmbH, Heiligenberger 100, Salem, 88682, Germany

Rihong Zhu

Nanjing University of Science and Technology, School of Electronic Engineering and Optoelectronic Techniques, Nanjing, 210094, China

Zhishan Gao

Nanjing University of Science and Technology, School of Electronic Engineering and Optoelectronic Techniques, Nanjing, 210094, China

Caojin Yuan

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, Stuttgart, 70569, Germany

Wolfgang Osten

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, Stuttgart, 70569, Germany

Opt. Eng. 50(5), 055801 (May 20, 2011). doi:10.1117/1.3575649
History: Received December 24, 2010; Revised March 18, 2011; Accepted March 21, 2011; Published May 20, 2011; Online May 20, 2011
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Computer-generated holograms (CGHs) allow to transfer the high 2D-positioning accuracy of modern lithography equipment into high precision 3D-shape measurements, e.g. in CGH asphere metrology. In this contribution, we give a detailed look into the characterization of steep topologies with CGHs on the example of a 90 deg axicon surface, requiring rather high line densities in the hologram. Several aspects gain importance with increasing CGH line densities when measuring dimensional quantities such as the cone angle of the surface: misalignment of the setup, fabrication effects of the CGH rigorous effects of the high density grating, and effects due to wavelength variations of the interferometer. This paper presents the experimental approach for the cone angle measurement and a systematic analysis of its measurement uncertainty, focusing on the specifics of this null test CGH measurement.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Jun Ma ; Christof Pruss ; Matthias Häfner ; Bernd Heitkamp ; Rihong Zhu, et al.
"Systematic analysis of the measurement of cone angles using high line density computer-generated holograms", Opt. Eng. 50(5), 055801 (May 20, 2011). ; http://dx.doi.org/10.1117/1.3575649


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