Systematic analysis of the measurement of cone angles using high line density computer-generated holograms

Jun Ma; Christof Pruss; Matthias Häfner; Caojin Yuan; Wolfgang Osten; Bernd Heitkamp; Rihong Zhu; Zhishan Gao

doi:10.1117/1.3575649

1 May 2011 Systematic analysis of the measurement of cone angles using high line density computer-generated holograms

Jun Ma, Christof Pruss, Matthias Häfner, Caojin Yuan, Wolfgang Osten, Bernd Heitkamp, Rihong Zhu, Zhishan Gao

Author Affiliations +

Optical Engineering, Vol. 50, Issue 5, 055801 (May 2011). https://doi.org/10.1117/1.3575649

Abstract

Computer-generated holograms (CGHs) allow to transfer the high 2D-positioning accuracy of modern lithography equipment into high precision 3D-shape measurements, e.g. in CGH asphere metrology. In this contribution, we give a detailed look into the characterization of steep topologies with CGHs on the example of a 90 deg axicon surface, requiring rather high line densities in the hologram. Several aspects gain importance with increasing CGH line densities when measuring dimensional quantities such as the cone angle of the surface: misalignment of the setup, fabrication effects of the CGH rigorous effects of the high density grating, and effects due to wavelength variations of the interferometer. This paper presents the experimental approach for the cone angle measurement and a systematic analysis of its measurement uncertainty, focusing on the specifics of this null test CGH measurement.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jun Ma, Christof Pruss, Matthias Häfner, Caojin Yuan, Wolfgang Osten, Bernd Heitkamp, Rihong Zhu, and Zhishan Gao "Systematic analysis of the measurement of cone angles using high line density computer-generated holograms," Optical Engineering 50(5), 055801 (1 May 2011). https://doi.org/10.1117/1.3575649

Published: 1 May 2011

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