Problems of efficiency and quality improvement of diamond-abrasive finishing of optical materials by tools with bounded polishing powders, including diamond powder, are considered. The dependences of the particle number on the diffusion angle and coordinate of the contact have been derived in the studies of the dynamics of collision and diffusion of slime particles. The coordinate dependence of the flat surface roughness of glass K8 optics in fine diamond grinding has been described. Interaction and dispersion of deterioration particles in a contact zone of the tool and the processed sample in the course of polishing is described and the dispersion structure of deterioration particles of the tool on slime particles and on deterioration particles is explained oscillatory. It is shown a that differential dispersion section of deterioration particles on slime particles is not less than on deterioration particles and is maximum at corners of dispersion close to 0° and 180° on the central sites of a contact zone. Coordinate dependence of the full dispersion section of deterioration particles of the tool and dependence of microprofile height of the processed surface on circular zones radius are calculated.