Ultraviolet and X-ray Applications

Efficient extreme ultraviolet transmission gratings for plasma diagnostics

[+] Author Affiliations
Christoph Braig

Friedrich-Schiller-Universität Jena, Institut für Angewandte Physik, Max-Wien-Platz 1, Jena 07743, Germany

Peter Predehl

Max-Planck-Institut für Extraterrestrische Physik, Giessenbachstr. 1, Garching 85748, Germany

Ernst-Bernhard Kley

Friedrich-Schiller-Universität Jena, Institut für Angewandte Physik, Max-Wien-Platz 1, Jena 07743, Germany

Opt. Eng. 50(6), 066501 (June 09, 2011). doi:10.1117/1.3584844
History: Received October 13, 2010; Accepted April 12, 2011; Revised April 04, 2011; Published June 09, 2011; Online June 09, 2011
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We report on a theoretical study of free-standing phase transmission gratings for high-resolution extreme ultraviolet (EUV) and soft x-ray spectroscopy and investigate their properties. Designed for wavelengths between about 2 and 40 nm, the devices may provide a first order diffraction efficiency beyond 30%. We use rigorous coupled wave analysis methods in order to optimize the grating design parameters and discuss features of segmented grating arrays. Elemental, as well as compound, materials such as Be, Mo, LiF, and poly-(methylmethacrylate) are considered with respect to their potential and practical limitations in terms of feasibility and sensitivity to radiation damage. Simulations are performed for several samples on the radiation produced by a table-top EUV plasma source and applications to astrophysical problems are considered.

© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Christoph Braig ; Peter Predehl and Ernst-Bernhard Kley
"Efficient extreme ultraviolet transmission gratings for plasma diagnostics", Opt. Eng. 50(6), 066501 (June 09, 2011). ; http://dx.doi.org/10.1117/1.3584844


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