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Special Section on Integrated Optics

Slab optical waveguides in Er3 +-doped tellurite glass by N+ ion implantation at 1.5 MeV

[+] Author Affiliations
Simone Berneschi

Museo Storico della Fisica e Centro di Studi e Ricerche “Enrico Fermi”, Piazza del Viminale 2, I-00184 Roma, Italy and IFAC-CNR, “Nello Carrara” Institute of Applied Physics, via Madonna del Piano 10, I-50019 Sesto Fiorentino, Firenze, Italy

Massimo Brenci

IFAC-CNR, “Nello Carrara” Institute of Applied Physics, via Madonna del Piano 10, I-50019 Sesto Fiorentino, Firenze, Italy

Gualtiero Nunzi Conti

IFAC-CNR, “Nello Carrara” Institute of Applied Physics, via Madonna del Piano 10, I-50019 Sesto Fiorentino, Firenze, Italy

Stefano Pelli

IFAC-CNR, “Nello Carrara” Institute of Applied Physics, via Madonna del Piano 10, I-50019 Sesto Fiorentino, Firenze, Italy

Marco Bettinelli

University Verona and INSTM, Laboratory di Chimica dello Stato Solido, Department of Biotecnologie, UdR Verona, Strada Le Grazie 15, I-37134 Verona, Italy and IFAC-CNR, “Nello Carrara” Institute of Applied Physics, via Madonna del Piano 10, I-50019 Sesto Fiorentino, Firenze, Italy

Adolfo Speghini

University Verona and INSTM, Laboratory di Chimica dello Stato Solido, Department of Biotecnologie, UdR Verona, Strada Le Grazie 15, I-37134 Verona, Italy

Istvan Bányász

Research Institute for Solid State Physics and Optics of the Hungarian Academy of Sciences, Department of Crystal Physics, P.O. Box 49, H-1525, Budapest, Hungary

Miklós Fried

Research Institute for Technical Physics and Materials Science of the Hungarian Academy of Sciences, Department of Photonics, P.O. Box 49, H-1525, Budapest, Hungary

Nguyen Q. Khanh

Research Institute for Technical Physics and Materials Science of the Hungarian Academy of Sciences, Microtechnology Department, P.O. Box 49, H-1525, Budapest, Hungary

Tivadar Lohner

Research Institute for Technical Physics and Materials Science of the Hungarian Academy of Sciences, Department of Photonics, P.O. Box 49, H-1525, Budapest, Hungary

Péter Petrik

Research Institute for Technical Physics and Materials Science of the Hungarian Academy of Sciences, Department of Photonics, P.O. Box 49, H-1525, Budapest, Hungary

Andrea Watterich

Research Institute for Solid State Physics and Optics of the Hungarian Academy of Sciences, Department of Crystal Physics, P.O. Box 49, H-1525, Budapest, Hungary

Zsolt Zolnai

Research Institute for Technical Physics and Materials Science of the Hungarian Academy of Sciences, P.O. Box 49, H-1525, Budapest, Hungary

Opt. Eng. 50(7), 071110 (April 27, 2011). doi:10.1117/1.3559209
History: Received October 20, 2010; Revised January 04, 2011; Accepted January 10, 2011; Published April 27, 2011; Online April 27, 2011
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Slab optical waveguides were fabricated in tung-sten-tellurite glass doped with Er3 + ions by means of nitrogen ion implantation at 1.5 MeV. A wide range of ion doses (from 5·1012 to 8·1016 ions/cm2) was used. Optical characterization, performed by dark-line spectroscopy, revealed that the waveguides were of optical barrier type: the implanted layer exhibited a decrease of the refractive index with respect to the virgin bulk glass, while the region comprised between the sample surface and the end of the ion track acted as an optical guiding structure. It was also demonstrated that a post-implantation annealing process, performed at various temperatures on the samples implanted at higher doses, contributes to the reduction of the barrier region.

Figures in this Article
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Simone Berneschi ; Massimo Brenci ; Gualtiero Nunzi Conti ; Stefano Pelli ; Marco Bettinelli, et al.
"Slab optical waveguides in Er3 +-doped tellurite glass by N+ ion implantation at 1.5 MeV", Opt. Eng. 50(7), 071110 (April 27, 2011). ; http://dx.doi.org/10.1117/1.3559209


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