Special Section on Advances of Optical Metrology in the Transportation Industry

Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry

[+] Author Affiliations
Giancarlo Pedrini

University of Stuttgart, Institute of Applied Optics, Pfaffenwaldring 9, Stuttgart, 70569 Germany

João Gaspar

University of Freiburg, Department of Microsystems Engineering – IMTEK, Georges-Koehler-Allee 103, Freiburg, 79110 Germany

Marek E. Schmidt

University of Freiburg, Department of Microsystems Engineering – IMTEK, Georges-Koehler-Allee 103, Freiburg, 79110 Germany

Igor Alekseenko

University of Stuttgart, Institute of Applied Optics, Pfaffenwaldring 9, Stuttgart, 70569 Germany

Oliver Paul

University of Freiburg, Department of Microsystems Engineering – IMTEK, Georges-Koehler-Allee 103, Freiburg, 79110 Germany

Wolfgang Osten

University of Stuttgart, Institute of Applied Optics, Pfaffenwaldring 9, Stuttgart, 70569 Germany

Opt. Eng. 50(10), 101504 (June 14, 2011). doi:10.1117/1.3572186
History: Received December 01, 2010; Revised February 11, 2011; Accepted February 14, 2011; Published June 14, 2011; Online June 14, 2011
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Optical techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. We present a strategy for the calibration of setups to be used for the measurements of microsystems. We develop, at first, standard reference devices whose out-of-plane and in-plane displacements are precisely reproducible when submitted to standard loadings. These reference devices have been manufactured and tested by optical techniques and may be used for the calibration of optical measuring systems. Furthermore, a detailed discussion of the measurement uncertainty, according to the ISO’s “Guide of Expression of Uncertainty in Measurement,” is given.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Giancarlo Pedrini ; João Gaspar ; Marek E. Schmidt ; Igor Alekseenko ; Oliver Paul, et al.
"Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry", Opt. Eng. 50(10), 101504 (June 14, 2011). ; http://dx.doi.org/10.1117/1.3572186


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