Optical Sensors

Optical tilt sensor with direct intensity-modulated scheme

[+] Author Affiliations
Shuangshuang Zhao

Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou 310027, China

Juan Zhang

Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou 310027, China

Changlun Hou

Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou 310027, China

Jian Bai

Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou 310027, China

Guoguang Yang

Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou 310027, China

Opt. Eng. 50(11), 114405 (October 27, 2011). doi:10.1117/1.3655566
History: Received August 13, 2011; Revised September 24, 2011; Accepted September 28, 2011; Published October 27, 2011; Online October 27, 2011
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An optical tilt sensor based on a phase-sensitive diffraction grating with direct intensity-modulated scheme is proposed in this paper. The tilt sensor consists of a coherent light source, an integrated grating, a mechanical sensing part, and an optical signal processing circuit. The mechanical sensing part consists of a bulk proof mass and two cantilevers that can be fabricated with a two-mask process on a silicon-on-insulator substrate. A phase-sensitive diffraction grating, which was formed with the integrated grating and the upper surface of the proof mass, acts as the sensing element for the tilt measurement. Experimental results show this tilt sensor provides the optimal tilt sensitivity of 1.15 V/° and resolution of about 0.0046°, and a measurement range of ±20° in a rotational plane that is perpendicular to the direction of the earth's gravity.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Shuangshuang Zhao ; Juan Zhang ; Changlun Hou ; Jian Bai and Guoguang Yang
"Optical tilt sensor with direct intensity-modulated scheme", Opt. Eng. 50(11), 114405 (October 27, 2011). ; http://dx.doi.org/10.1117/1.3655566


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