Optical Components, Detectors, and Displays

Electroactive polymer-based spatial light modulator with high reliability and fast response speed

[+] Author Affiliations
Guangmin Ouyang, Kaiying Wang

Vestfold University College, Raveien 197, Horten, 3179, Norway

Lars Henriksen

PoLight AS, Horten, 3179, Norway

Xuyuan Chen

Vestfold University College, Raveien 197, Horten, 3179, Norway

Opt. Eng. 50(12), 124001 (December 05, 2011). doi:10.1117/1.3659216
History: Received August 05, 2011; Revised October 11, 2011; Accepted October 19, 2011; Published December 05, 2011; Online December 05, 2011
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An electroactive polymer (EAP)-based MOEMS spatial light modulator (SLM), which shows high reliability and fast response speed, is reported in this work. The reliability is achieved by designing the SLM without direct contact between electrodes and deformable EAP surface; while the fast response speed is obtained by optimizing the microstructure of the EAP material. The concept of SLM, material optimization approach, fabrication processes, as well as characterization methods, are described. The SLM is driven by relatively low voltage, which is 200 V dc and 60 V ac and the response time is 35 μs. The manufactured SLM shows no degradation or breakdown after millions of actuation cycles, indicating a good reliability of the device.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Guangmin Ouyang ; Kaiying Wang ; Lars Henriksen and Xuyuan Chen
"Electroactive polymer-based spatial light modulator with high reliability and fast response speed", Opt. Eng. 50(12), 124001 (December 05, 2011). ; http://dx.doi.org/10.1117/1.3659216


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