1 December 1982 Automated Cylindrical Polishing Of Grazing Incidence X-Ray Mirrors
Robert A. Jones, Norman Geril
Author Affiliations +
Abstract
The use of focusing x-ray systems depends upon the specular reflection at grazing incidence. These systems require mirrors with both excellent surface figure and superior surface finish. In order to obtain an efficient predictable method of fabricating such optics, Perkin-Elmer's computer-controlled polishing techniques have been adapted for grinding and polishing cylindrical mirrors. This process accurately controls the time that the tool polishes at each surface location to achieve the prescribed surface material removal.
Robert A. Jones and Norman Geril "Automated Cylindrical Polishing Of Grazing Incidence X-Ray Mirrors," Optical Engineering 21(6), 216051 (1 December 1982). https://doi.org/10.1117/12.7973031
Published: 1 December 1982
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CITATIONS
Cited by 5 scholarly publications and 1 patent.
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KEYWORDS
Polishing

Mirrors

Grazing incidence

Surface finishing

X-rays

Process control

Control systems

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