Electron Beam Fabrication Of Computer-Generated Holograms

Steven M. Arnold

doi:10.1117/12.7973578

1 August 1985 Electron Beam Fabrication Of Computer-Generated Holograms

Steven M. Arnold

Author Affiliations +

Optical Engineering, Vol. 24, Issue 5, 245803 (August 1985). https://doi.org/10.1117/12.7973578

Abstract

We report here the development of an integrated capability for writing computer-generated holograms (CGHs) using either of two commercially available electron-beam lithography systems. These binary, chrome-on-glass holograms have been used extensively for aspheric optical testing and also have applications to the interferometric recording of holograms. Algorithms are described for encoding CGHs for drawing by e-beam systems. Limitations of e-beam CGH fabrication are discussed. A self-contact lithography and ion milling process is described for con-verting chrome-on-glass holograms into 40% efficient, environmentally durable all-glass holograms.

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Steven M. Arnold "Electron Beam Fabrication Of Computer-Generated Holograms," Optical Engineering 24(5), 245803 (1 August 1985). https://doi.org/10.1117/12.7973578

Published: 1 August 1985

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