Antireflection Coatings For Silicon Charge-Coupled Devices

Michael Lesser

doi:10.1117/12.7974170

1 September 1987 Antireflection Coatings For Silicon Charge-Coupled Devices

Michael Lesser

Author Affiliations +

Optical Engineering, Vol. 26, Issue 9, 269911 (September 1987). https://doi.org/10.1117/12.7974170

Abstract

With the increasing use of charge-coupled devices for astronomical observations, it is vital to obtain the highest quantum efficiency possible due to the limited amount of observing time available on large telescopes. One method of increasing the response of back-illuminated CCDs is to apply antireflection coatings. Because silicon's index of refraction is extremely high in the ultra-violet, a gain of more than 100% in quantum efficiency can be achieved at a wavelength of 0.37 Am with the proper choice of dielectric thin-film materials. We present a study of materials suitable for silicon CCD antireflection coatings for use in the 0.32 to 1.0 Am spectral range. Constraints on these materials, such as refractive index, absorption coefficient, application method, tempera-ture requirements, internal stress, and radioactivity, are discussed. We find hafnium oxide, lead fluoride, and aluminum oxide to be among the most suitable thin-film materials available. We also present a number of single- and multiple-layer antireflection coating designs optimized for CCDs, with particular emphasis on the blue and ultraviolet.

Citation Download Citation

Michael Lesser "Antireflection Coatings For Silicon Charge-Coupled Devices," Optical Engineering 26(9), 269911 (1 September 1987). https://doi.org/10.1117/12.7974170

Published: 1 September 1987

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available