Fast dynamic interferometric lithography for large submicrometric period diffraction gratings production

Valentin Gâté; Gérard Bernaud; Colette Veillas; Anthony Cazier; Francis Vocanson; Yves Jourlin; Michel Langlet

doi:10.1117/1.OE.52.9.091712

22 March 2013 Fast dynamic interferometric lithography for large submicrometric period diffraction gratings production

Valentin Gâté, Gérard Bernaud, Colette Veillas, Anthony Cazier, Francis Vocanson, Yves Jourlin, Michel Langlet

Author Affiliations +

Optical Engineering, Vol. 52, Issue 9, 091712 (March 2013). https://doi.org/10.1117/1.OE.52.9.091712

Abstract

This paper describes a successful technological transfer, from a state laboratory to an industrial company, for writing long and large submicron period gratings (potentially square-meter sized), implemented in an industrial direct laser beam writing equipment at 355 nm wavelength (Dilase 750 from KLOE SA company). The writing head, which has been inserted in the machine, consists of a phase mask which enables it to project a set of fringes pattern of small area onto a photoresist-coated substrate. As the substrate is continuously moving, one-dimensional or two-dimensional gratings can be fabricated over large areas limited only by the machine’s stage displacement range. The optical scheme is described from the beam shaping to the printing processes and the phase mask optimization. In order to demonstrate the technology, 600 nm period gratings of over 20 cm in length have been fabricated. Such submicron structures can be used in solar cell modules for photon trapping and as antireflection coatings.

Citation Download Citation

Valentin Gâté, Gérard Bernaud, Colette Veillas, Anthony Cazier, Francis Vocanson, Yves Jourlin, and Michel Langlet "Fast dynamic interferometric lithography for large submicrometric period diffraction gratings production," Optical Engineering 52(9), 091712 (22 March 2013). https://doi.org/10.1117/1.OE.52.9.091712

Published: 22 March 2013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available