Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template

Zhao Wu; Qing-na Wang; Hong-da Sun; Miao Lu

doi:10.1117/1.OE.52.6.063401

4 June 2013 Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template

Zhao Wu, Qing-na Wang, Hong-da Sun, Miao Lu

Author Affiliations +

Optical Engineering, Vol. 52, Issue 6, 063401 (June 2013). https://doi.org/10.1117/1.OE.52.6.063401

Abstract

Here, we introduced a new method to fabricate a shape-controllable microlens array (MLA). A conductive membrane was deformed by electrostatic force through applied voltage on its underneath electrodes, and polymer primer was poured in this concave template to form an MLA after curing and a demolding process. Through changing the initial contour of the template as well as the location and bias of the underneath electrodes, the so-called molding by electrostatic force deformed template (MEFDT) method has the ability to realize a shape-controllable microsized MLA in a flexible, easy-to-design, and low-cost way. Polydimethylsiloxane MLAs were fabricated to verify this MEFDT method, and the fabricated MLAs had a surface roughness less than 2 nm that showed acceptable optical smoothness, and their focal lengths were demonstrated to be adjustable by applying different voltage on their affiliated templates.

Citation Download Citation

Zhao Wu, Qing-na Wang, Hong-da Sun, and Miao Lu "Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template," Optical Engineering 52(6), 063401 (4 June 2013). https://doi.org/10.1117/1.OE.52.6.063401

Published: 4 June 2013

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