Instrumentation, Techniques, and Measurement

Combination of guided mode and photometric optical metrology methods for precise determination of refractive index dispersion: application to polymer blend and ceramic thin films for gas sensors

[+] Author Affiliations
Thomas Wood

Aix-Marseille University, Institut Matériaux Microélectronique Nanosciences de Provence-IM2NP, CNRS-UMR 6242, Domaine Universitaire de Saint-Jérôme, Service 231, 13397 Marseille, France

Judikaël Le Rouzo

Aix-Marseille University, Institut Matériaux Microélectronique Nanosciences de Provence-IM2NP, CNRS-UMR 6242, Domaine Universitaire de Saint-Jérôme, Service 231, 13397 Marseille, France

François Flory

Aix-Marseille University, Institut Matériaux Microélectronique Nanosciences de Provence-IM2NP, CNRS-UMR 6242, Domaine Universitaire de Saint-Jérôme, Service 231, 13397 Marseille, France

Ecole Centrale Marseille, Technopôle de Château Gombert, Marseille 13013, France

Paul Coudray

Kloé SA, Hotel d’Entreprise du Millenaire, Montpellier 34000, France

Valmor Roberto Mastelaro

Sao Paulo University, Instituto de Física de São Carlos, São Carlos 13560, Brazil

Pedro Pelissari

Sao Paulo University, Instituto de Física de São Carlos, São Carlos 13560, Brazil

Sergio Zilio

Sao Paulo University, Instituto de Física de São Carlos, São Carlos 13560, Brazil

Opt. Eng. 52(9), 094104 (Sep 10, 2013). doi:10.1117/1.OE.52.9.094104
History: Received April 4, 2013; Revised July 10, 2013; Accepted August 16, 2013
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Abstract.  Two optical techniques, m-lines and spectroscopic ellipsometry, are compared for their suitability for obtaining the wavelength and the temperature dispersion of the refractive index of thin-film layers used in gas detector devices. Two types of materials that are often integrated into gas sensors are studied: a polymer organic–inorganic blend deposited by spin coating typically used in near-infrared waveguides and the ceramic semiconductor SrTi1xFexO3 (strontium titanate) doped with iron at concentrations x=0.075 and 0.1 deposited by electron beam deposition. The refractive index dispersion obtained by m-lines and ellipsometry is compared, and the differences between the measured parameters for the two materials are discussed. The chromatic dispersion will be represented by a three-term Cauchy law. An intuitive method for verifying the measured indices using an integrating sphere and reflexion coefficient modeling techniques are also demonstrated. Thermo-optic coefficients in the order of 1×104/K for both materials are reported, and very low chromatic dispersions are also measured, thanks to the high sensitivity of the m-lines technique. The uniaxial anisotropic properties of the polymer-blend films are measured and discussed in the case of the semiconductor films.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Thomas Wood ; Judikaël Le Rouzo ; François Flory ; Paul Coudray ; Valmor Roberto Mastelaro, et al.
"Combination of guided mode and photometric optical metrology methods for precise determination of refractive index dispersion: application to polymer blend and ceramic thin films for gas sensors", Opt. Eng. 52(9), 094104 (Sep 10, 2013). ; http://dx.doi.org/10.1117/1.OE.52.9.094104


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