Special Section on Advances of Precision Optical Measurements and Instrumentation for Geometrical and Mechanical Quantities

Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder

[+] Author Affiliations
Xinghui Li

Tohoku University, Department of Nanomechanics, Sendai 980-8579, Japan

Yuki Shimizu

Tohoku University, Department of Nanomechanics, Sendai 980-8579, Japan

Takeshi Ito

Tohoku University, Department of Nanomechanics, Sendai 980-8579, Japan

Yindi Cai

Tohoku University, Department of Nanomechanics, Sendai 980-8579, Japan

So Ito

Tohoku University, Department of Nanomechanics, Sendai 980-8579, Japan

Wei Gao

Tohoku University, Department of Nanomechanics, Sendai 980-8579, Japan

Opt. Eng. 53(12), 122405 (May 12, 2014). doi:10.1117/1.OE.53.12.122405
History: Received March 3, 2014; Revised April 2, 2014; Accepted April 23, 2014
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Abstract.  A multiprobe surface encoder for optical metrology of six-degree-of-freedom (six-DOF) planar motions is presented. The surface encoder is composed of an XY planar scale grating with identical microstructures in X- and Y-axes and an optical sensor head. In the optical sensor head, three paralleled laser beams were used as laser probes. After being divided by a beam splitter, the three laser probes were projected onto the scale grating and a reference grating with identical microstructures, respectively. For each probe, the first-order positive and negative diffraction beams along the X- and Y-directions from the scale grating and from the reference grating superimposed with each other and four pieces of interference signals were generated. Three-DOF translational motions of the scale grating Δx, Δy, and Δz can be obtained simultaneously from the interference signals of each probe. Three-DOF angular error motions θX, θY, and θZ can also be calculated simultaneously from differences of displacement output variations and the geometric relationship among the three probes. A prototype optical sensor head was designed, constructed, and evaluated. Experimental results verified that this surface encoder could provide measurement resolutions of subnanometer and better than 0.1 arc sec for three-DOF translational motions and three-DOF angular error motions, respectively.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Xinghui Li ; Yuki Shimizu ; Takeshi Ito ; Yindi Cai ; So Ito, et al.
"Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder", Opt. Eng. 53(12), 122405 (May 12, 2014). ; http://dx.doi.org/10.1117/1.OE.53.12.122405


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