Method to calculate the error correction ability of tool influence function in certain polishing conditions

Jia Wang; Bin Fan; Yongjian Wan; Chunyan Shi; Bin Zhuo

doi:10.1117/1.OE.53.7.075106

25 July 2014 Method to calculate the error correction ability of tool influence function in certain polishing conditions

Jia Wang, Bin Fan, Yongjian Wan, Chunyan Shi, Bin Zhuo

Author Affiliations +

Optical Engineering, Vol. 53, Issue 7, 075106 (July 2014). https://doi.org/10.1117/1.OE.53.7.075106

Abstract

Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions.

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Jia Wang, Bin Fan, Yongjian Wan, Chunyan Shi, and Bin Zhuo "Method to calculate the error correction ability of tool influence function in certain polishing conditions," Optical Engineering 53(7), 075106 (25 July 2014). https://doi.org/10.1117/1.OE.53.7.075106

Published: 25 July 2014

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