CO2 laser mitigation of the ultraviolet laser damage site on a fused silica surface

Zhou Fang; Yuan’an Zhao; Wei Sun; Zehan Li; Guohang Hu; Xiaofeng Liu; Dawei Li; Jianda Shao

doi:10.1117/1.OE.53.8.084107

8 August 2014 CO₂ laser mitigation of the ultraviolet laser damage site on a fused silica surface

Zhou Fang, Yuan’an Zhao, Wei Sun, Zehan Li, Guohang Hu, Xiaofeng Liu, Dawei Li, Jianda Shao

Author Affiliations +

Optical Engineering, Vol. 53, Issue 8, 084107 (August 2014). https://doi.org/10.1117/1.OE.53.8.084107

Abstract

The CO² laser mitigation method has been developed to mitigate the ultraviolet laser damage site on a fused silica surface. The mitigation process was monitored by an on-line white light scattering imaging system in order to ensure that the mitigation is successful. Additionally, a total internal reflection microscope was utilized to analyze the mitigation pit. By optimizing the laser mitigation parameters, the rough damage site can be replaced by a smooth Gaussian-shaped mitigation pit. The chemical composition of the damage sites and the CO² laser mitigation pits was also measured with energy dispersive x-ray spectroscopy. It reveals that the oxygen deficiency center defect of the ultraviolet laser damage site is removed after CO² laser mitigation, which helps us better understand the CO² laser mitigation process.

Citation Download Citation

Zhou Fang, Yuan’an Zhao, Wei Sun, Zehan Li, Guohang Hu, Xiaofeng Liu, Dawei Li, and Jianda Shao "CO₂ laser mitigation of the ultraviolet laser damage site on a fused silica surface," Optical Engineering 53(8), 084107 (8 August 2014). https://doi.org/10.1117/1.OE.53.8.084107

Published: 8 August 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available