Optical metrology of a large deformable aspherical mirror using software configurable optical test system

Run Huang; Peng Su; Todd Horne; Guido Brusa; James H. Burge

doi:10.1117/1.OE.53.8.085106

15 August 2014 Optical metrology of a large deformable aspherical mirror using software configurable optical test system

Run Huang, Peng Su, Todd Horne, Guido Brusa, James H. Burge

Author Affiliations +

Optical Engineering, Vol. 53, Issue 8, 085106 (August 2014). https://doi.org/10.1117/1.OE.53.8.085106

Abstract

The software configurable optical test system (SCOTS) is an efficient metrology technology based on reflection deflectometry that uses only a liquid-crystal display and a camera to measure surface slope. The surface slope is determined by triangulation using the co-ordinates of the display screen, camera, and test mirror. We present our SCOTS test results concentrated on high dynamic range measurements of low order aberrations. The varying astigmatism in the 910-mm diameter aspheric deformable secondary mirror for the large binocular telescope was measured with SCOTS, requiring no null corrector. The SCOTS system was designed on-axis with camera and screen aligned on the optical axis of the test mirror with the help of a 6-inch pellicle beam splitter. The on-axis design provides better control of the astigmatism in the test. The high dynamic range of the slope provided a measurement of astigmatism within 0.2-μm root-mean-square accuracy in the presence of 231-μm peak-to-valley aspheric departure. The simplicity of the test allowed the measurements to be performed at multiple gravity angles.

Citation Download Citation

Run Huang, Peng Su, Todd Horne, Guido Brusa, and James H. Burge "Optical metrology of a large deformable aspherical mirror using software configurable optical test system," Optical Engineering 53(8), 085106 (15 August 2014). https://doi.org/10.1117/1.OE.53.8.085106

Published: 15 August 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available