Far-field spatially angle-resolved scattering measurements: practical way to recover surface topography

Myriam Zerrad; Michel Lequime; Claude Amra

doi:10.1117/1.OE.53.9.092012

15 August 2014 Far-field spatially angle-resolved scattering measurements: practical way to recover surface topography

Myriam Zerrad, Michel Lequime, Claude Amra

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Optical Engineering, Vol. 53, Issue 9, 092012 (August 2014). https://doi.org/10.1117/1.OE.53.9.092012

Abstract

Angle-resolved scattering techniques are currently used to extract the second-order statistical moments (roughness spectra or autocorrelation function) of surface topography, but have not allowed the recovery of the surface topography itself. We show how we could solve this point with an original setup based on spatially resolved measurements. Hence, the technique provides a breakthrough in light-scattering characterization.

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Myriam Zerrad, Michel Lequime, and Claude Amra "Far-field spatially angle-resolved scattering measurements: practical way to recover surface topography," Optical Engineering 53(9), 092012 (15 August 2014). https://doi.org/10.1117/1.OE.53.9.092012

Published: 15 August 2014

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