28 August 2014 Computer numeric control subaperture aspheric surface polishing—microroughness evaluation
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Abstract
The aim of this work was an investigation of surface microroughness and shape accuracy achieved on an aspheric lens by subaperture computer numeric control (CNC) polishing. Different optical substrates were polished (OHARA S-LAH 58, SF4, ZERODUR) using a POLITEX™ polishing pad, synthetic pitch, and the natural optical pitch. Surface roughness was measured by light interferometer. The best results were achieved on the S-LAH58 glass and the ZERODUR™ using the natural optical pitch. In the case of SF4 glass, the natural optical pitch showed a tendency to scratch the surface. Experiments also indicated a problem in surface form deterioration when using the natural optical pitch, regardless of the type of optical material.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2014/$25.00 © 2014 SPIE
Frantisek Prochaska, Jaroslav Polak, Ondrej Matousek, and David Tomka "Computer numeric control subaperture aspheric surface polishing—microroughness evaluation," Optical Engineering 53(9), 092011 (28 August 2014). https://doi.org/10.1117/1.OE.53.9.092011
Published: 28 August 2014
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Polishing

Surface finishing

Glasses

Aspheric lenses

Zerodur

Surface roughness

Finite element methods

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