Special Section on Laser Damage II

Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres

[+] Author Affiliations
Tao Ding

Key Laboratory of Advanced Microstructure Materials, Ministry of Education, Shanghai 200092, China

Tongji University, School of Physics Science and Engineering, Institute of Precision Optical Engineering, Shanghai 200092, China

Yujiang Xie, Zhenxiang Shen, Xinbing Cheng, Zhanshan Wang

Key Laboratory of Advanced Microstructure Materials, Ministry of Education, Shanghai 200092, China

Tongji University, School of Physics Science and Engineering, Institute of Precision Optical Engineering, Shanghai 200092, China

Opt. Eng. 53(12), 122514 (Oct 06, 2014). doi:10.1117/1.OE.53.12.122514
History: Received May 3, 2014; Revised September 9, 2014; Accepted September 10, 2014
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Abstract.  Micron and submicron scale artificial silica spheres were used to quantitatively detect the ultrasonic cleaning procedure for an ultrasmooth optical substrate. Silica spheres with sizes from 1 to 3μm were explored to efficiently reduce the ultrasonic power for ultrasonic frequencies of 40, 80, and 120 kHz. On account of submicron silica spheres with sizes from 0.3 to 1.0μm, the cleaning efficiencies for the ultrasonic frequencies of 170, 220, and 270 kHz were quantity evaluated, and the removal efficiency was effectively increased by employing a solution of NH4OH, H2O2, and deionized water with an optimized configuration. Furthermore, for the range from 40 to 270 kHz, according to investigations of the ultrasonic time, the particles’ removal process was explored during the ultrasonic treatments, and the damages of ultrasound on the ultrasmooth substrate within the ultrasonic time were also detected. The quantitative results give us many clues for realizing the optimization of an ultrasonic cleaning procedure for ultrasmooth optical substrates.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Tao Ding ; Yujiang Xie ; Zhenxiang Shen ; Xinbing Cheng and Zhanshan Wang
"Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres", Opt. Eng. 53(12), 122514 (Oct 06, 2014). ; http://dx.doi.org/10.1117/1.OE.53.12.122514


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