Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres

Tao Ding; Yujiang Xie; Zhenxiang Shen; Xinbing Cheng; Zhanshan Wang

doi:10.1117/1.OE.53.12.122514

6 October 2014 _{Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres}

Tao Ding, Yujiang Xie, Zhenxiang Shen, Xinbing Cheng, Zhanshan Wang

Author Affiliations +

Optical Engineering, Vol. 53, Issue 12, 122514 (October 2014). https://doi.org/10.1117/1.OE.53.12.122514

Abstract

Micron and submicron scale artificial silica spheres were used to quantitatively detect the ultrasonic cleaning procedure for an ultrasmooth optical substrate. Silica spheres with sizes from 1 to 3 μm were explored to efficiently reduce the ultrasonic power for ultrasonic frequencies of 40, 80, and 120 kHz. On account of submicron silica spheres with sizes from 0.3 to 1.0 μm, the cleaning efficiencies for the ultrasonic frequencies of 170, 220, and 270 kHz were quantity evaluated, and the removal efficiency was effectively increased by employing a solution of NH₄OH, H₂O₂, and deionized water with an optimized configuration. Furthermore, for the range from 40 to 270 kHz, according to investigations of the ultrasonic time, the particles’ removal process was explored during the ultrasonic treatments, and the damages of ultrasound on the ultrasmooth substrate within the ultrasonic time were also detected. The quantitative results give us many clues for realizing the optimization of an ultrasonic cleaning procedure for ultrasmooth optical substrates.

Citation Download Citation

Tao Ding, Yujiang Xie, Zhenxiang Shen, Xinbing Cheng, and Zhanshan Wang "_{Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres}," Optical Engineering 53(12), 122514 (6 October 2014). https://doi.org/10.1117/1.OE.53.12.122514

Published: 6 October 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available