Imaging Components, Systems, and Processing

Quantitative interferometric microscopy with improved full-field phase aberration compensation

[+] Author Affiliations
Liang Xue

Shanghai University of Electric Power, College of Electronics and Information Engineering, No. 2103 Pingliang Road, Shanghai 200090, China

Shouyu Wang

Nanjing University of Science and Technology, Department of Information Physics and Engineering, No. 200 Xiaolingwei Street, Nanjing, Jiangsu 210094, China

Nanjing Agricultural University, College of Veterinary Medicine, Single Molecule Nanometry Laboratory, No. 1 Weigang Road, Nanjing, Jiangsu 210095, China

Keding Yan

Nanjing University of Science and Technology, Department of Information Physics and Engineering, No. 200 Xiaolingwei Street, Nanjing, Jiangsu 210094, China

Xi’an Technological University, School of Electronic Information Engineering, No. 2 Xuefu Middle Road, Xi’an, Shaanxi 710032, China

Nan Sun

Shanghai Institute of Quality Inspection and Technical Research, Institute of Quality Inspection of Electronics and Electrical Appliances, No. 900 Jiangyue Road, Shanghai 201114, China

Zhenhua Li

Nanjing University of Science and Technology, Department of Information Physics and Engineering, No. 200 Xiaolingwei Street, Nanjing, Jiangsu 210094, China

Fei Liu

Nanjing Agricultural University, College of Veterinary Medicine, Single Molecule Nanometry Laboratory, No. 1 Weigang Road, Nanjing, Jiangsu 210095, China

Opt. Eng. 53(11), 113105 (Nov 06, 2014). doi:10.1117/1.OE.53.11.113105
History: Received July 22, 2014; Revised September 28, 2014; Accepted October 10, 2014
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Abstract.  Single-shot quantitative interferometric microscopy (QIM) needs a high-accuracy and rapid phase retrieval algorithm. Retrieved phase distributions are often influenced by phase aberration background caused by both imaging system and phase retrieval algorithms. Here, we propose an improved phase aberration compensation (PAC) approach in order to eliminate the phase aberrations inherent in the data. With this method, sample-free parts are identified and used to calculate the background phase, reducing phase errors induced in samples and providing high-quality phase images. We now demonstrate that QIM based on this PAC approach realizes high-quality phase imaging from a single interferogram. This is of great potential for a real-time speedy diagnosis.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Liang Xue ; Shouyu Wang ; Keding Yan ; Nan Sun ; Zhenhua Li, et al.
"Quantitative interferometric microscopy with improved full-field phase aberration compensation", Opt. Eng. 53(11), 113105 (Nov 06, 2014). ; http://dx.doi.org/10.1117/1.OE.53.11.113105


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