Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation

Wei Huang; Chengfu Ma; Yuhang Chen

doi:10.1117/1.OE.53.12.124103

18 December 2014 Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation

Wei Huang, Chengfu Ma, Yuhang Chen

Author Affiliations +

Optical Engineering, Vol. 53, Issue 12, 124103 (December 2014). https://doi.org/10.1117/1.OE.53.12.124103

Abstract

A method for simple and reliable displacement measurement with nanoscale resolution is proposed. The measurement is realized by combining a common optical microscopy imaging of a specially coded nonperiodic microstructure, namely two-dimensional zero-reference mark (2-D ZRM), and subsequent correlation analysis of the obtained image sequence. The autocorrelation peak contrast of the ZRM code is maximized with well-developed artificial intelligence algorithms, which enables robust and accurate displacement determination. To improve the resolution, subpixel image correlation analysis is employed. Finally, we experimentally demonstrate the quasi-static and dynamic displacement characterization ability of a micro 2-D ZRM.

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Wei Huang, Chengfu Ma, and Yuhang Chen "Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation," Optical Engineering 53(12), 124103 (18 December 2014). https://doi.org/10.1117/1.OE.53.12.124103

Published: 18 December 2014

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