Instrumentation, Techniques, and Measurement

Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation

[+] Author Affiliations
Wei Huang, Chengfu Ma, Yuhang Chen

University of Science and Technology of China, Department of Precision Machinery and Precision Instrumentation, Hefei 230026, China

Opt. Eng. 53(12), 124103 (Dec 18, 2014). doi:10.1117/1.OE.53.12.124103
History: Received September 18, 2014; Accepted November 21, 2014
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Abstract.  A method for simple and reliable displacement measurement with nanoscale resolution is proposed. The measurement is realized by combining a common optical microscopy imaging of a specially coded nonperiodic microstructure, namely two-dimensional zero-reference mark (2-D ZRM), and subsequent correlation analysis of the obtained image sequence. The autocorrelation peak contrast of the ZRM code is maximized with well-developed artificial intelligence algorithms, which enables robust and accurate displacement determination. To improve the resolution, subpixel image correlation analysis is employed. Finally, we experimentally demonstrate the quasi-static and dynamic displacement characterization ability of a micro 2-D ZRM.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Wei Huang ; Chengfu Ma and Yuhang Chen
"Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation", Opt. Eng. 53(12), 124103 (Dec 18, 2014). ; http://dx.doi.org/10.1117/1.OE.53.12.124103


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