Optical Design and Engineering

Optimization of bandpass optical filters based on TiO2 nanolayers

[+] Author Affiliations
Nathalie Démarest

Kerdry Thin Solid Films, 5 rue De Broglie, 22300 Lannion, France

Institut des Sciences Chimiques de Rennes, UMR 6226 UR1-CNRS, Université de Rennes 1, Campus de Beaulieu, 35042 Rennes Cedex, France

Damien Deubel, Jean-Claude Keromnès, Claude Vaudry

Kerdry Thin Solid Films, 5 rue De Broglie, 22300 Lannion, France

Fabien Grasset

Institut des Sciences Chimiques de Rennes, UMR 6226 UR1-CNRS, Université de Rennes 1, Campus de Beaulieu, 35042 Rennes Cedex, France

National Institute of Material Science, CNRS, UMI 3629, Laboratory for Innovative Key Materials and Structures (LINK), 1-1 Namiki, 305-0044 Tsukuba, Japan

Ronan Lefort

Institut de Physique de Rennes, 263 Avenue du General Leclerc CS 74205, 35042 Rennes Cedex, France

Maryline Guilloux-Viry

Institut des Sciences Chimiques de Rennes, UMR 6226 UR1-CNRS, Université de Rennes 1, Campus de Beaulieu, 35042 Rennes Cedex, France

Opt. Eng. 54(1), 015101 (Jan 02, 2015). doi:10.1117/1.OE.54.1.015101
History: Received August 25, 2014; Accepted November 25, 2014
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Abstract.  The design and realization of high-quality bandpass optical filters are often very difficult tasks due to the strong correlation of the optical index of dielectric thin films to their final thickness, as observed in many industrial deposition processes. We report on the optimization of complex optical filters in the visible and NIR spectral ranges as realized by ion beam-assisted electron beam deposition of silica and titanium oxide multilayers. We show that this process always leads to amorphous films prior to thermal annealing. On the contrary, the optical dispersion of TiO2 nanolayers is highly dependent on their thickness, while this dependence vanishes for layers thicker than 100 nm. We demonstrate that accounting for this nonlinear dependence of the optical index is both very important and necessary in order to obtain high-quality optical filters.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Nathalie Démarest ; Damien Deubel ; Jean-Claude Keromnès ; Claude Vaudry ; Fabien Grasset, et al.
"Optimization of bandpass optical filters based on TiO2 nanolayers", Opt. Eng. 54(1), 015101 (Jan 02, 2015). ; http://dx.doi.org/10.1117/1.OE.54.1.015101


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