Instrumentation, Techniques, and Measurement

Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching

[+] Author Affiliations
Fen Gao

Xi’an Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, No. 28 Xianning West Road, Xi’an 710049, China

Xi’an Technological University, School of Optoelectronic Engineering, No. 4 Jinhua North Road, Xi’an 710032, China

Zhuangde Jiang, Zixin Zhao

Xi’an Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, No. 28 Xianning West Road, Xi’an 710049, China

Bing Li

Xi’an Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, No. 28 Xianning West Road, Xi’an 710049, China

Opt. Eng. 54(1), 014102 (Jan 02, 2015). doi:10.1117/1.OE.54.1.014102
History: Received June 22, 2014; Accepted December 4, 2014
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Abstract.  Point diffraction interferometry (PDI) combined with annular subaperture stitching is proposed for ultrahigh-accuracy measurements of aspheric surfaces. By adding an axial movement to the test optics in the PDI system, aspheric surfaces with large departures can be measured with high accuracy by stitching the annular measurement data of different axial positions. We examine the principle of PDI-based annular subaperture stitching and the stitching algorithm. Simulations and experiments demonstrate the feasibility and effectiveness of our proposed method. Our method retains the ultra-high accuracy of PDI while extending the vertical dynamic range of the interferometer, enabling nanometer or even subnanometer accuracy measurements of large-departure rotationally symmetric aspheric surfaces.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Fen Gao ; Zhuangde Jiang ; Zixin Zhao and Bing Li
"Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching", Opt. Eng. 54(1), 014102 (Jan 02, 2015). ; http://dx.doi.org/10.1117/1.OE.54.1.014102


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