Instrumentation, Techniques, and Measurement

Reconstruction of planar periodic structures based on Fourier analysis of moiré patterns

[+] Author Affiliations
Ronghua Zhu, Huimin Xie, Minjin Tang, Chuanwei Li, Dan Wu

Tsinghua University, Department of Engineering Mechanics, Key laboratory for Applied Mechanics of Ministrator of Education, Beijing 100084, China

Opt. Eng. 54(4), 044102 (Apr 09, 2015). doi:10.1117/1.OE.54.4.044102
History: Received February 20, 2015; Accepted March 20, 2015
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Abstract.  In recent years, inverse moiré methods have been developed to reconstruct micro/nano-scale planar periodic structures with a larger field of view than those constructed using conventional methods. In these methods, moiré fringes generated by superposition of the periodic structure and a reference grating are analyzed to reconstruct the periodic structure. There are two approaches to inverse moiré methods: the fringe-centerlines method and the phase-shifting method. The former has lower accuracy and is difficult to automate, while the latter requires at least three moiré images with complicated processing. A reconstruction method for planar periodic structures using Fourier analysis is proposed. This method can be used to characterize the micro/nano periodic structure from a single microscope moiré pattern. At the same time, when combined with a linewidth characterization method, the period and linewidth of the microstructure can be obtained simultaneously. As practical examples, the period and linewidth of a scanning electron microscopy raster are calibrated. Then the microstructures of a micro-electroformed grating and a butterfly wing are reconstructed using the calibrated system. The proposed method provides a tool for the characterization of large area micro/nano periodic structures. Further, this is a promising approach to detect defects in periodic structures.

© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Ronghua Zhu ; Huimin Xie ; Minjin Tang ; Chuanwei Li and Dan Wu
"Reconstruction of planar periodic structures based on Fourier analysis of moiré patterns", Opt. Eng. 54(4), 044102 (Apr 09, 2015). ; http://dx.doi.org/10.1117/1.OE.54.4.044102


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