Instrumentation, Techniques, and Measurement

Phase error analysis and reduction in phase measuring deflectometry

[+] Author Affiliations
Yuxiang Wu, Huimin Yue, Jingya Yi, Mingyang Li, Yong Liu

University of Electronic Science and Technology of China, School of Optoelectronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu 610054, China

Opt. Eng. 54(6), 064103 (Jun 23, 2015). doi:10.1117/1.OE.54.6.064103
History: Received January 8, 2015; Accepted May 28, 2015
Text Size: A A A

Abstract.  In phase measuring deflectometry (PMD), the inspection accuracy of the defects and height of the specular surface are related to the level of phase errors. The usage of numeric integration in reconstructing the shape and the defocusing capture of the fringe pattern, which will amplify the phase errors, make error discussion more significant in PMD than other shape measurement techniques. Phase error analysis and reduction in PMD are presented. The random noises, nonlinear response function, the nontelecentric imaging of the charge-coupled device camera, and the nonlinear response function of the liquid crystal display screen are the main phase error sources in PMD. The analytical relation between the random phase error and its influence factors in PMD is deduced. From the relation formulation, the influence factors of random phase error are analyzed, and the results are proven by the simulation and experiment. A possible phase error-reduction method, which integrates several methods for congeneric errors in fringe projection profilometry, is investigated to reduce phase errors in PMD. This composite method is proven to have a good performance by a plane mirror experiment.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Yuxiang Wu ; Huimin Yue ; Jingya Yi ; Mingyang Li and Yong Liu
"Phase error analysis and reduction in phase measuring deflectometry", Opt. Eng. 54(6), 064103 (Jun 23, 2015). ; http://dx.doi.org/10.1117/1.OE.54.6.064103


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.