Materials, Photonic Devices, and Sensors

Fabrication of nanostructures on silicon carbide surface and microgroove sidewall using 800-nm femtosecond laser

[+] Author Affiliations
Vanthanh Khuat

Xi’an Jiaotong University, School of Electronics and Information Engineering, Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, No. 28, Xianning West Road, Xi’an 710049, China

Le Quy Don Technical University, Lab of Advanced Technology, No. 100, Hoang Quoc Viet Street, Hanoi 7EN-248, Vietnam

Tao Chen

Xi’an Jiaotong University, School of Electronics and Information Engineering, Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, No. 28, Xianning West Road, Xi’an 710049, China

Vanluu Dao

Le Quy Don Technical University, Lab of Advanced Technology, No. 100, Hoang Quoc Viet Street, Hanoi 7EN-248, Vietnam

Opt. Eng. 54(7), 077102 (Jul 23, 2015). doi:10.1117/1.OE.54.7.077102
History: Received April 24, 2015; Accepted June 22, 2015
Text Size: A A A

Abstract.  Nanoripples and nanoparticles have been fabricated on the surface of a silicon carbide sample with the irradiation of an 800-nm femtosecond laser in an underwater environment. When a linearly polarized laser was used, the nanoripples were perpendicular to the polarization direction of the incident laser, and the period of the nanoripples was dependent on the number of pulses. When a circularly polarized laser was used, nanoparticles with a diameter of approximately 80 nm were formed. In addition, we observed two kinds of nanoripples on the sidewall of the silicon carbide microgroove fabricated by femtosecond laser irradiation followed by chemical wet etching. When the polarization direction was aligned perpendicular to the writing direction, ripples parallel to the surface of the sample were formed. We attribute the formation of this kind of ripple to interference of the incident laser and the reflected wave. When the polarization direction was aligned parallel to the writing direction, the ripples are perpendicular to the surface of the sample. We attribute the formation of this kind of ripple to interference of incident laser and bulk electron plasma wave. A scanning electron microscope equipped with an energy dispersive X-ray spectroscope was employed to characterize the morphology of the structures.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Vanthanh Khuat ; Tao Chen and Vanluu Dao
"Fabrication of nanostructures on silicon carbide surface and microgroove sidewall using 800-nm femtosecond laser", Opt. Eng. 54(7), 077102 (Jul 23, 2015). ; http://dx.doi.org/10.1117/1.OE.54.7.077102


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.