Instrumentation, Techniques, and Measurement

Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm

[+] Author Affiliations
Hua Shen, Rihong Zhu, Lei Chen, Jia Li

Nanjing University of Science and Technology, School of Electronic Engineering and Photo-Electric Technology, 200 Xiaolin Wei Street, Nanjing, Jiangsu Province 210094, China

Opt. Eng. 54(7), 074105 (Jul 27, 2015). doi:10.1117/1.OE.54.7.074105
History: Received April 21, 2015; Accepted June 22, 2015
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Abstract.  As is well-known, optical testing has begun to emerge as a limiting factor in the application of freeform surfaces. In all kinds of published freeform optical metrology, the tilted-wave-interferometer (TWI) is the precise and flexible method for testing a freeform surface as it can compensate the local surface’s deviation from its best fit sphere by using a set of tilted waves. In the process of measurement with TWI, accurate assessment of the test surface error from the fringes plays a key role. We present a method for evaluation and characterization of surface aberrations in TWI by combining computer-generated wave technology and a retrace errors elimination algorithm. The feasibility of the method is proved by the simulation and experimental results.

© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Hua Shen ; Rihong Zhu ; Lei Chen and Jia Li
"Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm", Opt. Eng. 54(7), 074105 (Jul 27, 2015). ; http://dx.doi.org/10.1117/1.OE.54.7.074105


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