Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm

Hua Shen; Rihong Zhu; Lei Chen; Jia Li

doi:10.1117/1.OE.54.7.074105

27 July 2015 Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm

Hua Shen, Rihong Zhu, Lei Chen, Jia Li

Author Affiliations +

Optical Engineering, Vol. 54, Issue 7, 074105 (July 2015). https://doi.org/10.1117/1.OE.54.7.074105

Abstract

As is well-known, optical testing has begun to emerge as a limiting factor in the application of freeform surfaces. In all kinds of published freeform optical metrology, the tilted-wave-interferometer (TWI) is the precise and flexible method for testing a freeform surface as it can compensate the local surface’s deviation from its best fit sphere by using a set of tilted waves. In the process of measurement with TWI, accurate assessment of the test surface error from the fringes plays a key role. We present a method for evaluation and characterization of surface aberrations in TWI by combining computer-generated wave technology and a retrace errors elimination algorithm. The feasibility of the method is proved by the simulation and experimental results.

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Hua Shen, Rihong Zhu, Lei Chen, and Jia Li "Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm," Optical Engineering 54(7), 074105 (27 July 2015). https://doi.org/10.1117/1.OE.54.7.074105

Published: 27 July 2015

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